TY  - CONF
AU  - Lee, V.
AU  - Soles, Christopher
AU  - Liu, D
AU  - Bauer, Barry
AU  - Lin, Eric
AU  - Wu, Wen-Li
C2  - International Interconnect Technology Conference (IITC) Proceeding, Burlingame, CA
DA  - 2003-01-01 00:01:00
LA  - en
PB  - International Interconnect Technology Conference (IITC) Proceeding, Burlingame, CA
PY  - 2003
TI  - Structural Characterization of Methylsilsesquioxane-Based Porous Low-k using X-ray Porosimetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853912
ER  -