TY  - JOUR
AU  - Jones, Ronald
AU  - Hu, T
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Kolb, R
AU  - Casa, D
AU  - Bolton, P
AU  - Barclay, Z
C2  - Applied Physics Letters
DA  - 2003-01-01 00:01:00
LA  - en
M1  -  83(19)
PB  - Applied Physics Letters
PY  - 2003
TI  - Small Angle X-ray Scattering as a Tool for Sub-100 nm Pattern Characterization
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853894
ER  -