TY  - JOUR
AU  - Kummamuru, Ravi
AU  - Hu, L
AU  - Cook, Lawrence
AU  - Efremov, M
AU  - Olson, E
AU  - Green, Martin
AU  - Allen, L
C2  - Journal of Microelectromechanical Systems
DA  - 2008-05-05 00:05:00
LA  - en
PB  - Journal of Microelectromechanical Systems
PY  - 2008
TI  - Close Proximity Self-Aligned Shadow Mask for Sputter Deposition Onto a Membrane or Cavity
ER  -