TY  - JOUR
AU  - Josell, Daniel
AU  - Kim, S
AU  - Wheeler, Daniel
AU  - Moffat, Thomas
AU  - Pyo, S
C2  - Journal of the Electrochemical Society
DA  - 2003-04-03 00:04:00
LA  - en
M1  - 150
PB  - Journal of the Electrochemical Society
PY  - 2003
TI  - Interconnect Fabrication by Superconformal Iodine-Catalyzed Chemical Vapor
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853177
ER  -