TY  - JOUR
AU  - Liu, Yiping
AU  - Wu, Wen-Li
AU  - Foran, B
AU  - Gidley, D
AU  - Lee, Hae-Jeong
AU  - Bauer, Barry
AU  - Vogt, B
C2  - Advanced Metalization Conference
DA  - 2021-10-12 15:10:19
LA  - en
PB  - Advanced Metalization Conference
PY  - 2021
TI  - The Pore Structure and Its Impacts on Property and Performance of a Spin-on Porous Low k Dielectric
ER  -