TY  - JOUR
AU  - Lee, V.
AU  - Soles, Christopher
AU  - Ro, Hyun
AU  - Hines, Daniel
AU  - Jones, Ronald
AU  - Lin, Eric
AU  - Wu, Wen-Li
C2  - Applied Physics Letters
DA  - 2005-12-01 00:12:00
LA  - en
M1  - 87
PB  - Applied Physics Letters
PY  - 2005
TI  - Nanoimprint Pattern Transfer Quality from Specular X-Ray Reflectivity
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852501
ER  -