TY  - JOUR
AU  - Vogt, B
AU  - Goldfarb, D
AU  - Angelopoulos, M
AU  - Soles, Christopher
AU  - Wang, C
AU  - Prabhu, Vivek
AU  - McGuiggan, P
AU  - Douglas, Jack
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Satija, Sushil
C2  - Journal of Microlithography Microfabrication and Microsystems
DA  - 2005-02-01 00:02:00
LA  - en
M1  - 4
PB  - Journal of Microlithography Microfabrication and Microsystems
PY  - 2005
TI  - Water Immersion of Model Photoresists: Interfacial Influences on Water Concentration and Surface Morphology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852338
ER  -