TY  - JOUR
AU  - Prabhu, Vivek
AU  - Jones, Ronald
AU  - Lin, Eric
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Soles, Christopher
AU  - Wu, Wen-Li
AU  - Goldfarb, D
AU  - Angelopoulos, M
C2  - Polymeric Materials: Science & Engineering
DA  - 2002-08-01 00:08:00
LA  - en
M1  - 87
PB  - Polymeric Materials: Science & Engineering
PY  - 2002
TI  - Reaction Front Induced Roughness in Chemically Amplified Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852008
ER  -