TY  - JOUR
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Fischer, Daniel
AU  - Sambasivan, S
AU  - Lin, Eric
AU  - Jones, Ronald
AU  - Soles, Christopher
AU  - Wu, Wen-Li
AU  - Goldfarb, D
AU  - Angelopoulos, M
C2  - Langmuir
DA  - 2005-03-01 00:03:00
LA  - en
M1  - 21 No. 9
PB  - Langmuir
PY  - 2005
TI  - X-ray Absorption Spectroscopy to Probe Surface Composition and Surface Deprotection in Photoresist Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852399
ER  -