TY  - CONF
AU  - Jablonski, E
AU  - Prabhu, Vivek
AU  - Sambasivan, S
AU  - Fischer, Daniel
AU  - Lin, Eric
AU  - Goldfarb, D
AU  - Angelopolous, M
AU  - Ito, H
C2  - Proceedings of SPIE, Santa Clara, CA, US
DA  - 2004-09-01 00:09:00
LA  - en
M1  - 5376
PB  - Proceedings of SPIE, Santa Clara, CA, US
PY  - 2004
TI  - Surface and Bulk Chemistry of Chemically Amplified Photoresists: Segregation in Thin Films and Environmental Stability Issues
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852294
ER  -