TY  - CONF
AU  - Lee, H
AU  - Lin, Eric
AU  - Wang, Haonan
AU  - Wu, Wen-Li
AU  - Chen, W
AU  - Deis, T
C2  - International Interconnect Technology Conference | | | IEEE, Undefined
DA  - 2001-06-01 00:06:00
LA  - en
M1  - 87(18)
PB  - International Interconnect Technology Conference | | | IEEE, Undefined
PY  - 2001
TI  - Characterization of Porous Low-k Dielectric Thin Films Using X-ray Reflectivity and Small-angle Neutron Scattering and Ion Scattering
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851871
ER  -