TY  - ICOMM
AU  - Bauer, Barry
AU  - Lee, V.
AU  - Hedden, R
AU  - Soles, Christopher
AU  - Liu, D
AU  - Wu, Wen-Li
C1  - http://www.sns.gov/acns/
C2  - Electronic Publication
DA  - 2002-07-01 00:07:00
LA  - en
M1  - 35(13)
PB  - Electronic Publication
PY  - 2002
TI  - SANS Characterization of Nanoporous Thin Films for the Next Generation of Integrated Circuits
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852061
ER  -