TY  - JOUR
AU  - Josell, Daniel
AU  - Wheeler, Daniel
AU  - Huber, W
AU  - Bonevich, John
AU  - Moffat, Thomas
C2  - Journal of the Electrochemical Society
DA  - 2001-11-02 00:11:00
LA  - en
M1  - 148
PB  - Journal of the Electrochemical Society
PY  - 2001
TI  - A Simple Equation for Predicting Superconformal Electrodeposition in Submicrometer Trenches
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853067
ER  -