TY  - CONF
AU  - White, Christopher
AU  - Wu, Wen-Li
C2  - Low-Dielectric Constant Materials IV, Undefined
DA  - 1998-04-01 00:04:00
LA  - en
M1  - 511
PB  - Low-Dielectric Constant Materials IV, Undefined
PY  - 1998
TI  - A Novel Method to Determine the Mechanical Properties of Ultra-Thin Films
ER  -