TY  - JOUR
AU  - Jones, Ronald
AU  - Willson, C
AU  - Hu, T
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Goldfarb, D
AU  - Angelopoulos, M
AU  - Trinque, B
AU  - Schmidt, G
AU  - Stewart, M
C2  - Journal of Polymer Science Part B-Polymer Physics
DA  - 2004-09-01 00:09:00
LA  - en
M1  - 42
PB  - Journal of Polymer Science Part B-Polymer Physics
PY  - 2004
TI  - Formation of Deprotected Fuzzy Blobs in Chemically Amplified Resists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852245
ER  -