TY  - CONF
AU  - Devadoss, C
AU  - Wang, Yijun
AU  - Puligadda, R
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Jablonski, E
AU  - Fischer, Daniel
AU  - Sambasivan, S
AU  - Lin, Eric
AU  - Wu, Wen-Li
C2  - Optical Microlithography, Conference |16th | Optical Microlithography XVI | SPIE, Santa Clara, CA
DA  - 2003-06-01 00:06:00
LA  - en
M1  - 5040
PB  - Optical Microlithography, Conference |16th | Optical Microlithography XVI | SPIE, Santa Clara, CA
PY  - 2003
TI  - Investigation of BARC-Resist Interfacial Interactions
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852158
ER  -