TY  - JOUR
AU  - Lee, V.
AU  - Soles, Christopher
AU  - Liu, D
AU  - Bauer, Barry
AU  - Wu, Wen-Li
C2  - Polymer Preprints
DA  - 2002-08-01 00:08:00
LA  - en
M1  - 87
PB  - Polymer Preprints
PY  - 2002
TI  - X-Ray Reflectivity as a Metrology to Characterize Pore Size Distributions in Low-K Dielectric Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852038
ER  -