TY  - JOUR
AU  - Chiang, C.
AU  - Wallace, William
AU  - Lynn, G
AU  - Feiler, D
AU  - Xia, W.
C2  - Applied Physics Letters
DA  - 2000-01-01 00:01:00
LA  - en
M1  - 76
PB  - Applied Physics Letters
PY  - 2000
TI  - Thermally Induced Stress Relaxation and Densification of Spin-on-Glass Thin Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851605
ER  -