TY  - CONF
AU  - Goldfarb, D
AU  - Lin, Q
AU  - Angelopoulos, M
AU  - Soles, Christopher
AU  - Lin, Eric
AU  - Wu, Wen-Li
C2  - Advances in Resist Technology and Processing, Conference | 18th | Advances in Resist Technology and Processing XVIII  | SPIE, Undefined
DA  - 2001-08-01 00:08:00
LA  - en
M1  - 4345
PB  - Advances in Resist Technology and Processing, Conference | 18th | Advances in Resist Technology and Processing XVIII  | SPIE, Undefined
PY  - 2001
TI  - Characterization of Thin and Ultrathin Polymer and Resist Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851906
ER  -