TY  - JOUR
AU  - Goldfarb, D
AU  - Angelopoulos, M
AU  - Lin, Eric
AU  - Jones, Ronald
AU  - Soles, Christopher
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Wu, Wen-Li
C2  - Journal of Vacuum Science and Technology B
DA  - 2001-12-01 00:12:00
LA  - en
M1  - 19
PB  - Journal of Vacuum Science and Technology B
PY  - 2001
TI  - Confinement Effects on the Spatial Extent of the Reaction Front in Ultrathin Chemically Amplified Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851937
ER  -