TY  - JOUR
AU  - Beck, U
AU  - Smith, Douglas
AU  - Reiners, G
AU  - Dapkunas, S
C2  - Thin Solid Films
DA  - 1998-09-24 00:09:00
LA  - en
M1  - 332
PB  - Thin Solid Films
PY  - 1998
TI  - Mechanical Properties of Si<sub>02</sub> and Si<sub>3</sub>N<sub>4</sub> Coatings: A BAM/NIST Cooperative Project
ER  -