TY - JOUR AU - King, C AU - Pois, H AU - Zangooie, S AU - Young, R AU - Woicik, Joseph AU - Gupta, J C2 - Applied Physics Letters DA - 2021-10-12 15:10:19 LA - en PB - Applied Physics Letters PY - 2021 TI - Advanced Optical Techniques for the Determination of Composition and Thickness of Strained SiGe Alloys for a Manufacturing Environment ER -