TY  - JOUR
AU  - Chien, F
AU  - Hsieh, W
AU  - Gwo, S
AU  - Vladar, Andras
AU  - Dagata, John
C2  - Journal of Applied Physics
DA  - 2002-01-01 00:01:00
LA  - en
M1  - 91 No. 1044
PB  - Journal of Applied Physics
PY  - 2002
TI  - Silicon Nanostructures Fabricated by Scanning Probe Lithography and TMAH Etching
ER  -