TY  - CONF
AU  - Casa, D
AU  - Jones, R
AU  - Vorburger, Theodore
AU  - Orji, Ndubuisi
AU  - Barclay, G
AU  - Bolton, P
AU  - Wu, W
AU  - Lin, E
AU  - Hu, T
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor, Santa Clara, CA, USA
DA  - 2003-05-01 00:05:00
LA  - en
M1  - 5038
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor, Santa Clara, CA, USA
PY  - 2003
TI  - Subnanometer Wavelength Metrology of Lithographically Prepared structures: A Comparison of Neutron and X-Ray Scattering
ER  -