TY  - CONF
AU  - Koning, R
AU  - Dixson, Ronald
AU  - Fu, Joseph
AU  - Peng, G
AU  - Vorburger, Theodore
C2  - Proceedings of 4th Seminar on Quantitative Microscopy, K. Hasche, et al., Editors, PTB Report PTB-F-39, , 1, AU
DA  - 2000-01-01 00:01:00
LA  - en
PB  - Proceedings of 4th Seminar on Quantitative Microscopy, K. Hasche, et al., Editors, PTB Report PTB-F-39, , 1, AU
PY  - 2000
TI  - Interferometric Calibration of a Capacitance Displacement Sensor Over Short Displacement Ranges
ER  -