TY  - JOUR
AU  - Bouldin, Charles
AU  - Wallace, William
AU  - Lynn, G
AU  - Roth, S
AU  - Wu, Wen-Li
C2  - Journal of Applied Physics
DA  - 2000-07-01 00:07:00
LA  - en
M1  - 88
PB  - Journal of Applied Physics
PY  - 2000
TI  - Thermal Expansion Coefficients of Low-K Dielectric Films From Fourier Analysis of X-Ray Reflectivity
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850326
ER  -