TY  - CONF
AU  - Orji, N
AU  - Raja, Jayaraman
AU  - Vorburger, Theodore
C2  - Proceedings of the American Society for Precision Engineering, St. Louis, MO, USA
DA  - 2002-10-01 00:10:00
LA  - en
M1  - 17
PB  - Proceedings of the American Society for Precision Engineering, St. Louis, MO, USA
PY  - 2002
TI  - Atomic Force Microscopy of Semiconductor Line Edge Roughness
ER  -