TY  - CONF
AU  - Roberts, James
AU  - Banke, W
AU  - Dixson, Ronald
C2  - Proceedings of SPIE, San Jose, CA, USA
DA  - 2007-04-05 00:04:00
LA  - en
M1  - 6518
PB  - Proceedings of SPIE, San Jose, CA, USA
PY  - 2007
TI  - Leveraging LER to Minimize Linewidth Measurement Uncertainty in a Calibration Exercise
ER  -