TY  - CONF
AU  - Amatucci, E
AU  - Dagalakis, Nicholas
AU  - Kramar, John
AU  - Scire, Fredric
C2  - Proceedings of American Society for Precision Engineering, Scottsdale, AZ, USA
DA  - 2000-01-01 00:01:00
LA  - en
M1  - 22
PB  - Proceedings of American Society for Precision Engineering, Scottsdale, AZ, USA
PY  - 2000
TI  - Performance Evaluation of a Parallel Cantilever Biaxial Micropositioning Stage
ER  -