TY - CONF AU - Song, Jun-Feng AU - Evans, Christopher AU - McGlauflin, Michael AU - Whitenton, Eric AU - Vorburger, Theodore AU - Yuan, Y C2 - SPIE Electronic Imaging Conference, Scattering and Surface Roughness II, Zu-Han Gu, Alexei A. Maradudin, Editors, San Diego, CA, USA DA - 1998-10-01 00:10:00 LA - en M1 - 3426 PB - SPIE Electronic Imaging Conference, Scattering and Surface Roughness II, Zu-Han Gu, Alexei A. Maradudin, Editors, San Diego, CA, USA PY - 1998 TI - NIST Virtual/Physical Random Profile Roughness Calibration Standards ER -