TY  - CONF
AU  - Yang, H
AU  - Buice, E
AU  - Fagan, T
AU  - Smith, Stephen
AU  - Hocken, R
AU  - Trumper, D
AU  - Seugling, Richard
C2  - ASPE 19th Annual Meeting, Orlando, FL, USA
DA  - 2004-10-01 00:10:00
LA  - en
PB  - ASPE 19th Annual Meeting, Orlando, FL, USA
PY  - 2004
TI  - A Coarse/Fine Motion Control Stage; Preliminary Studies
ER  -