TY  - CONF
AU  - Katz, R
AU  - Chase, C
AU  - Kris, R
AU  - Peltinov, R
AU  - Villarrubia, John
AU  - Bunday, B
C2  - Proceedings of SPIE, San Jose, CA, USA
DA  - 2006-03-24 00:03:00
LA  - en
M1  - 6152
PB  - Proceedings of SPIE, San Jose, CA, USA
PY  - 2006
TI  - Bias Reduction in Roughness Measurement through SEM Noise Removal
ER  -