TY  - CONF
AU  - Sullivan, N.
AU  - Mastovich, M
AU  - Dixson, Ronald
AU  - Knutruda, P
AU  - Bunday, B
AU  - Febrea, P
AU  - Brandoma, R
C2  - ARCH Interface Conference, San Diego, CA, USA
DA  - 2002-01-01 00:01:00
LA  - en
PB  - ARCH Interface Conference, San Diego, CA, USA
PY  - 2002
TI  - Characterizing CDSEM Metrology of 193 nm Resists at Ultra Low Voltage
ER  -