TY  - CONF
AU  - Vorburger, Theodore
AU  - Song, Jun-Feng
AU  - Fu, Joseph
AU  - Tundermann, M
AU  - Renegar, Thomas
AU  - Doiron, Theodore
AU  - Orji, N
C2  - Proceedings of SPIE, SPIE Meeting - ICALEO 2000 Conference on Laser Microfabrication, Orlando, FL, USA
DA  - 2000-10-01 00:10:00
LA  - en
M1  - 90
PB  - Proceedings of SPIE, SPIE Meeting - ICALEO 2000 Conference on Laser Microfabrication, Orlando, FL, USA
PY  - 2000
TI  - Dimensional Metrology of Millimeter- and Sub-millimeter-scale Components
ER  -