TY  - JOUR
AU  - Chien, F
AU  - Hsieh, W
AU  - Gwo, S
AU  - Jun, Jay
AU  - Silver, Richard
AU  - Vladar, Andras
AU  - Dagata, John
C2  - Journal of Applied Physics
DA  - 2005-01-01 00:01:00
LA  - en
M1  - 23
PB  - Journal of Applied Physics
PY  - 2005
TI  - Characterization of Prototype Silicon Pitch Artifacts Fabricated by Scanning Probe Lithography and Anisotropic Wet Etching
ER  -