TY  - JOUR
AU  - Smith, Stewart
AU  - Tsiamis, Andreas
AU  - McCallum, Martin
AU  - Hourd, Andrew
AU  - Stevenson, J
AU  - Walton, Anthony
AU  - Dixson, Ronald
AU  - Allen, Richard
AU  - Potzick, James
AU  - Cresswell, Michael
AU  - Orji, Ndubuisi
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2009-02-19 00:02:00
LA  - en
M1  - 22
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2009
TI  - Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901862
ER  -