TY - CONF AU - Ryan, J.T. AU - Lenahan, Patrick AU - Krishnan, A.T. AU - Krishnan, S. AU - Campbell, Jason C2 - 2009 IEEE International Reliability Physics Symposium, Montreal, CA DA - 2009-04-26 00:04:00 LA - en PB - 2009 IEEE International Reliability Physics Symposium, Montreal, CA PY - 2009 TI - Spin Dependent Recombination Study of the Atomic-Scale Effects of Fluorine on the Negative Bias Temperature Instability UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902305 ER -