TY  - JOUR
AU  - Driemeier, C.
AU  - Bastos, K
AU  - Miotti, L
AU  - Baumvol, I.J.R.
AU  - Nguyen, Nhan
AU  - Sayan, Safak
AU  - Krug, C
C2  - Applied Physics Letters
DA  - 2005-11-17 00:11:00
LA  - en
M1  - 86
PB  - Applied Physics Letters
PY  - 2005
TI  - Compositional Stability of Hafnium Aluminates Thin Films Deposited on Si by Atomic Layer Deposition
ER  -