TY  - CONF
AU  - Cresswell, Michael
AU  - Park, Brandon
AU  - Allen, Richard
AU  - Guthrie, William
AU  - Dixson, Ronald
AU  - Tan, Wei
AU  - Murabito, Christine
C2  - ICMTS 2005 International Conference on Microelectronic Test Structures, Leuven, 1, BE
DA  - 2005-04-18 00:04:00
LA  - en
PB  - ICMTS 2005 International Conference on Microelectronic Test Structures, Leuven, 1, BE
PY  - 2005
TI  - Comparison of SEM and HRTEM CD-Measurements Extracted from Monocrystalline Tes-Structures Having Feature Linewidths from 40 nm to 240 nm
ER  -