TY  - CONF
AU  - Li, Bin
AU  - Shi, Li
AU  - Ho, Paul
AU  - Zhou, JiPing
AU  - Allen, Richard
AU  - Cresswell, Michael
C2  - IEEE ICMTS International Conference on Microelectronic Test Structures, Austin, TX, USA
DA  - 2006-04-01 00:04:00
LA  - en
PB  - IEEE ICMTS International Conference on Microelectronic Test Structures, Austin, TX, USA
PY  - 2006
TI  - Test Structures for Study of Electron Transport in Nickel Silicide Features with Linewidths between 40 nm and 100 nm
ER  -