TY  - CONF
AU  - Patrick, Heather
AU  - Germer, Thomas
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Dixson, Ronald
AU  - Bishop, Michael
C2  - Frontiers of Characterization and Metrology for Nanoelectronics: 2007, Gaithersburg, MD, USA
DA  - 2007-09-30 00:09:00
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics: 2007, Gaithersburg, MD, USA
PY  - 2007
TI  - Modeling and Analysis of Scatterometry Signatures for Optical Critical Dimension Reference Material Applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32756
ER  -