TY  - CONF
AU  - Nguyen, Nhan
AU  - Maslar, James
AU  - Kim, Junghyeun
AU  - Han, Jin-Ping
AU  - Park, Jin-Won
AU  - Chandler-Horowitz, Deane
AU  - Vogel, Eric
C2  - High  -Mobility Group -IV Materials and Devices, MRS Proceedings, San Francisco, CA, USA
DA  - 2005-05-09 00:05:00
LA  - en
PB  - High  -Mobility Group -IV Materials and Devices, MRS Proceedings, San Francisco, CA, USA
PY  - 2005
TI  - Characterization of Structural Quality of Bonded Silicon-On-Insulator Wafers by Spectroscopic Ellipsometry and Raman Spectroscopy
ER  -