TY  - JOUR
AU  - Kopanski, Joseph
AU  - Marchiando, Jay
AU  - Rennex, Brian
AU  - Simons, David
AU  - Chaudhury, R
C2  - Journal of Vacuum Science and Technology B
DA  - 2004-02-01 00:02:00
LA  - en
M1  - 22
PB  - Journal of Vacuum Science and Technology B
PY  - 2004
TI  - Towards reproducible SCM Image Interpretation
ER  -