TY - CONF AU - Ryan, J.T. AU - Lenahan, Patrick AU - Krishnan, A.T. AU - Krishnan, S. AU - Campbell, Jason C2 - 2008 IEEE International Integrated Reliability Workshop, South Lake Tahoe, NV, US DA - 2009-01-05 00:01:00 LA - en PB - 2008 IEEE International Integrated Reliability Workshop, South Lake Tahoe, NV, US PY - 2009 TI - An Electrically-Detected Magnetic Resonance Study of the Atomic-Scale Effects of Fluorine on the Negative Bias Temperature Instability UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=900189 ER -