TY  - CONF
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Ghoshtagore, Rathindra
AU  - Guillaume, Nadine
AU  - Shea, Patrick
AU  - Everist, Sarah
AU  - Linholm, Loren
C2  - ICMTS Proceedings, Santa Clara, CA, USA
DA  - 2000-04-06 00:04:00
LA  - en
PB  - ICMTS Proceedings, Santa Clara, CA, USA
PY  - 2000
TI  - Characterization of Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards
ER  -