TY  - JOUR
AU  - Diebold, Alain
AU  - Canterbury, J
AU  - Chism, W
AU  - Richter, Curt
AU  - Nguyen, Nhan
AU  - Ehrstein, James
AU  - Weintraub, C
C2  - Materials Science in Semiconductor Processing
DA  - 2001-02-06 00:02:00
LA  - en
M1  - 4
PB  - Materials Science in Semiconductor Processing
PY  - 2001
TI  - Characterization and Production Metrology of Gate Dielectric Films: Optical Models for Oxynitrides and High Dielectric Constant Films
ER  -