TY  - JOUR
AU  - Kremer, D
AU  - Davis, R
AU  - Moore, Elizabeth
AU  - Maslar, James
AU  - Jr., Donald Burgess
AU  - Ehrman, S
C2  - Journal of the Electrochemical Society
DA  - 2003-02-01 00:02:00
LA  - en
M1  - 150
PB  - Journal of the Electrochemical Society
PY  - 2003
TI  - An Investigation of Particle Dynamics in a Rotating Disk Chemical Vapor Deposition Reactor
ER  -