TY  - JOUR
AU  - Ramanath, G
AU  - Greene, J
AU  - Petrov, I
AU  - Baker, J
AU  - Allen, L
AU  - Gillen, J
C2  - Journal of Vacuum Science and Technology B
DA  - 2000-05-01 00:05:00
LA  - en
M1  - 18
PB  - Journal of Vacuum Science and Technology B
PY  - 2000
TI  - Channeling-Induced Asymmetric Distortion of Depth Profiles from Polycrystalline-TiN/Ti/TiN(001) Trilayers During Secondary Ion Mass Spectrometry
ER  -