TY  - JOUR
AU  - Kim, K
AU  - Moon, D
AU  - Chi, P
AU  - Simons, David
C2  - Surface and Interface Analysis
DA  - 2005-10-01 00:10:00
LA  - en
M1  - 37
PB  - Surface and Interface Analysis
PY  - 2005
TI  - Development of B-Doped Si Multiple Δ-Layer Reference Materials for SIMS Profiling
ER  -