TY  - JOUR
AU  - Zagozdzon-wosik, W
AU  - Korablev, K
AU  - Rusakova, I
AU  - Simons, David
AU  - Shi, J
AU  - Chi, P
AU  - Wolfe, J
C2  - Journal of the Electrochemical Society
DA  - 1996-12-01 00:12:00
LA  - en
M1  - 143
PB  - Journal of the Electrochemical Society
PY  - 1996
TI  - Formation of Shallow Junctions During Rapid Thermal Processing from Electron-Beam Deposited Boron Sources
ER  -